①Due to the coating under high vacuum, the deposition puller is less scattered by the collision of gas particles, and the coating performance is poor.
②Radio frequency radiation is harmful to the human body. You must pay attention to the use of a suitable power supply and load coupling and matching network. At the same time, there must be a good grounding to prevent radiation pre-venting. In addition, there must be good vibration to reduce or prevent the interference of radio frequency power to the side basin instrument.